Series II Standard Mass Flow Meter | #511BHSFD22V


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511BHSFD22V

Series II Standard Mass Flow Meter | #511BHSFD22V

Offers outstanding value in a wide range of industrial and lab applications. Exceptional accuracy and repeatability with flow ranges from 0.014 cc/min up to 1670 l/min. and working pressures up to 6000 PSIA. Offers multi-gas and multi-range capability


Technical Specifications

  • Pressure Control Range: 1450 PSIA
  • Body Material: 316L Stainless Steel
  • Flow Rate Accuracy: Standard: ± 0.5% Reading plus ± 0.1% Full Scale (± 1% Full Scale for ranges 3 - 5 ml/min; ± 2% Full Scale for ranges < 3 ml/min)
  • Turndown Ratio: 1 : 50 (in digital mode up to 1 : 187.5)
  • Repeatability: < 0.2% Reading
  • Maximum Operating Temperature: 70 °C
  • Minimum Operating Temperature: -10 °C
  • Temperature Coefficient: Zero: < 0.05% Full Scale / °C; span: < 0.05% Reading / °C °C
  • Pressure Coefficient: 0.1% / ATM typical N2; 0.01% / ATM typical H2 ATM
  • Leak Rate: Tested < 2 x 10-9 mbar l/s He L/sec
  • Attitude Sensitivity: Max. error at 90° off horizontal 0.2% at I ATM, typical N2
  • Warm-Up Time: 30 min. for optimum accuracy
    2 min. for accuracy ±2% Full Scale
  • Wetted Material: 316L Stainless Steel
  • Surface Finish: 0.8µm typical
  • Connection Material: 316L Stainless St eel
  • Specifications Met: IP40
  • Power Supply Voltage: +15 - 24
  • Power Consumption: 70 mA; Add 50 mA Profibus, if applicable
  • Electrical Connection: 9-PIN D-CONNECTOR
Safety Warning

Item Information

Parker's highly precise mass flow meters provide you the diagnostic stability and repeatability you need for low flow gas applications. Controlling thermal mass flow rates from 0.6 l/m to 1,670 l/m with high precision and <0.2% repeatability.  Rated for 8 separate gas types which are customer field adjustable. Our thermal mass flow meter is available in both digital and analog styles, fully compatible with RS232 and digital protocols such as Profibus.  If you're not sure what gas you're going to use or your process changes, our MFM allows you to migrate to a new gas within your flow range without purchasing a new mass flow meter.

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